Patent Assignment
Reel/Frame 069667/0146
Assignment of Assignor's Interest
Recorded: 2024-12-23
Pages: 3
Assignor
UEHARA, NOBORU
Executed: 2024-05-21
Assignee
SANTEC HOLDINGS CORPORATION
5823 OHKUSA-NENJOZAKA, KOMAKI-SHI, AICHI, 485-0802, JAPAN
Covered Property
(1)
Substrate Rotating Apparatus, Processing System, and Processing Method