Patent Assignment
Reel/Frame 069779/0696
Assignment of Assignor's Interest
Recorded: 2025-01-08
Pages: 16
Assignors
VUKKADALA, PRADEEP
Executed: 2024-11-04
ZHANG, CAO
Executed: 2024-11-04
BUROV, ANATOLY
Executed: 2024-11-04
PARSEY, GUY
Executed: 2024-11-03
KO, KYEONGEUN
Executed: 2024-11-13
BAKARIAN, SERGEI G.
Executed: 2024-11-01
KREK, JANEZ
Executed: 2024-11-04
BAI, KUNLUN
Executed: 2024-11-01
HIGGINS, CRAIG
Executed: 2024-11-04
GRAVES, JOHN S.
Executed: 2024-11-04
SMITH, MARK D.
Executed: 2024-11-14
BIAFORE, JOHN J.
Executed: 2024-11-04
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method to Calibrate, Predict, and Control Stochastic Defects in Euv Lithography