Patent Assignment
Reel/Frame 070303/0384
Confirmatory License
Recorded: 2025-02-24
Pages: 2
Assignor
UNIVERSITY OF COLORADO
Executed: 2023-04-19
Assignee
NATIONAL SCIENCE FOUNDATION
2415 EISENHOWER AVENUE, ALEXANDRIA, VIRGINIA, 22314
Covered Property
(1)
Enhancement of Thermal Atomic Layer Etching
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.