Patent Assignment
Reel/Frame 070612/0291
Assignment of Assignor's Interest
Recorded: 2025-03-24
Pages: 4
Assignors
ZHAO, KUI
Executed: 2024-08-06
IIZUKA, HIROSHI
Executed: 2024-08-07
WU, DEE
Executed: 2024-08-07
ZUO, RASON
Executed: 2024-08-06
NI, TUQIANG
Executed: 2024-08-08
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Temperature Control Apparatus for Semiconductor Processing Equipment, And Temperature Control Method for The Same