Patent Assignment
Reel/Frame 071322/0228
Assignment of Assignor's Interest
Recorded: 2025-06-05
Pages: 4
Assignors
YANG, CHANSYUN DAVID
Executed: 2020-10-30
YANG, CHAN-LON
Executed: 2020-10-30
CHANG, KEH-JENG
Executed: 2020-10-30
YUH, PERNG-FEI
Executed: 2020-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Radical-Activated Etching of Metal Oxides