Patent Assignment
Reel/Frame 071378/0654
Assignment of Assignor's Interest
Recorded: 2025-06-10
Pages: 5
Assignors
WANG, YIXIANG
Executed: 2021-01-23
LIU, SHIBING
Executed: 2020-11-22
LUO, YING
Executed: 2020-11-23
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method, Apparatus, and System for Dynamically Controlling an Electrostatic Chuck During an Inspection of Wafer