Patent Assignment
Reel/Frame 071568/0893
Assignment of Assignor's Interest
Recorded: 2025-06-30
Pages: 7
Assignors
SOTIROPOULOS, NIKOLAOS
Executed: 2021-04-06
HARTGERS, ALBERTUS
Executed: 2021-03-26
YPMA, MICHAEL FREDERIK
Executed: 2021-04-06
STEEGHS, MARCO MATHEUS LOUIS
Executed: 2021-04-01
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Method for Illumination Uniformity Correction