Patent Assignment
Reel/Frame 071951/0689
Assignment of Assignor's Interest
Recorded: 2025-08-06
Pages: 3
Assignor
SON, DUK HYUN
Executed: 2022-12-06
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Equipment Front End Module, Operating Method Thereof, and Substrate Processing Apparatus Including Same