Patent Assignment
Reel/Frame 071991/0873
Assignment of Assignor's Interest
Recorded: 2025-08-12
Pages: 7
Assignors
SMORENBURG, PETRUS WILHELMUS
Executed: 2021-11-01
EDWARD, STEPHEN
Executed: 2021-11-01
DONDERS, SJOERD NICOLAAS LAMBERTUS
Executed: 2021-11-02
SCHELLEKENS, ADRIANUS JOHANNES HENDRIKUS
Executed: 2021-11-01
O'DWYER, DAVID
Executed: 2021-11-02
NIKIPELOV, ANDREY
Executed: 2021-12-21
DE VRIES, GOSSE CHARLES
Executed: 2021-11-01
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
A Cleaning Method and Associated Illumination Source Metrology Apparatus