Patent Assignment
Reel/Frame 072517/0918
Assignment of Assignor's Interest
Recorded: 2025-10-09
Pages: 6
Assignors
SONG, SOO HAN
Executed: 2023-03-15
CHOI, JUNG BONG
Executed: 2023-03-15
YUN, KANG SEOP
Executed: 2023-03-15
LEE, YOUNG IL
Executed: 2023-03-15
KANG, MIN OK
Executed: 2023-03-15
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Wafer Heating Apparatus and Wafer Processing Apparatus Using the Same