Patent Assignment
Reel/Frame 073737/0558
Assignment of Assignor's Interest
Recorded: 2026-02-09
Pages: 2
Assignors
FISCHER, ANDREAS
Executed: 2017-06-01
LILL, THORSTEN
Executed: 2017-05-31
JANEK, RICHARD
Executed: 2017-06-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Control of Directionality in Atomic Layer Etching