Patent Assignment
Reel/Frame 073835/0600
Assignment of Assignor's Interest
Recorded: 2026-02-19
Pages: 4
Assignee
MKS INC.
2 TECH DRIVE, ANDOVER, MASSACHUSETTS, 01810
Covered Property
(1)
Valve Apparatuses and Related Methods for Wafer Transfer in a Semiconductor Processing System
Application:
19/436,145 →
Publication:
US US20260126118A1
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.