Patent Application
Utility
App. No. 19/436,145
· Confirmation No. 7963
VALVE APPARATUSES AND RELATED METHODS FOR WAFER TRANSFER IN A SEMICONDUCTOR PROCESSING SYSTEM
Applicant:
MKS Inc.
Docketed New Case - Ready for Examination
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| 2026-05-07 | NTC.PUB |
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| 2026-02-20 | FOR |
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| 2026-02-20 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 9 | View | |
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| 2026-02-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2026-02-20 | FOR |
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| 2026-02-20 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2026-02-19 | OATH |
Oath or Declaration filed | 3 | View | |
| 2026-02-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2026-01-30 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 1 | View | |
| 2026-01-30 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2026-01-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2026-01-30 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2026-01-29 | NTC.PUB.DATE |
Notice of New or Revised Publication Date | 1 | View | |
| 2025-12-30 | APP.TEXT |
Application body structured text document | — | View | |
| 2025-12-30 | PA.. |
Power of Attorney | 3 | View | |
| 2025-12-30 | SPEC |
Specification | 54 | View | |
| 2025-12-30 | CLM |
Claims | 5 | View | |
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Abstract | 1 | View | |
| 2025-12-30 | ADS |
Application Data Sheet | 9 | View | |
| 2025-12-30 | DRW |
Drawings-only black and white line drawings | 28 | View | |
| 2025-12-30 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-12-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-12-30 | DRW.SUPP |
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| 2025-12-30 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
Andrew B. Cowe
Andover, MA
Tseten Lungjangwa
Somerville, MA
Attorneys & Agents of Record
Classification
USPC
219/121.59
C23C16/4405
F16K3/04
H10P72/0441
H10P72/0402
H10P72/0462
C23C16/4409
C23C16/452
F16K3/0227
F16K3/06
F16K3/20
F16K3/207
H01J37/32357
H01J37/3244
H01J37/32513
H01J37/32522
H01J2237/002
Prosecution
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
- Customer No.
- 45134
- Docket No.
- ASX-196-US-CIP
- Confirmation No.
- 7963
Publication
- Pub. No.
- US20260126118A1
- Pub. Date
- 2026-05-07
Parent
is a Continuation in-part of
→
App. 19/306,637
Filed 2025-08-21
· Docketed New Case - Ready for Examination
Parent
is a Division of
→
App. 18/201,877
Filed 2023-05-25
· Abandoned -- Failure to Respond to an Office Action
Parent
is a Continuation in-part of
→
App. 16/849,871
· US 11,854,839
Filed 2020-04-15
· Patented Case
Parent
Claims priority from a provisional application
→
App. 63/347,740
Filed 2022-06-01
· Provisional Application Expired
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2026-02-19
INTELLECTUAL PROPERTY AGREEMENT SUPPLEMENT
Recorded 2026-01-13
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Quick Facts
- App. No.
- 19/436,145
- Filed
- 2025-12-30
- Pub. No.
- US20260126118A1
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
External Links