Process for preparing organotin compounds
Provided is an efficient and effective process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides the organotin compounds in a highly pure crystalline form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.
1. A compound of the Formula (II):
wherein each R is the same or different and is a C 1 -C 4 alkyl group and X is iodo, bromo, and chloro, provided that wherein X is chloro, at least one R is other than a methyl group.
2. The compound of claim 1 , wherein X is iodo.
3. The compound of claim 1 , wherein each R is the same.
4. The compound of claim 1 , wherein at least one R is a methyl group and X is chloro.