Semiconductor device and method of forming adhesive layer over insulating layer for bonding carrier to mixed surfaces of semiconductor die and encapsulant
View Patent ↗A semiconductor device has a semiconductor die disposed over the substrate. A conductive via is formed partially through the substrate. An encapsulant is deposited over the semiconductor die and substrate. An insulating layer is formed over the semiconductor die and encapsulant. The insulating layer includes an organic or inorganic insulating material. An adhesive layer is deposited over the insulating layer. The adhesive layer contacts only the insulating layer. A carrier is bonded to the adhesive layer. The insulating layer provides a single CTE across the entire bonding interface between the adhesive layer and semiconductor die and encapsulant. The constant CTE of the insulating layer reduces stress across the bonding interface. A portion of the substrate is removed by backgrinding to expose the conductive via. An insulating layer is formed over the substrate around the conductive via. An interconnect structure is formed over the conductive via.
1. A method of making a semiconductor device, comprising:
providing a substrate including a conductive via formed partially through the substrate;
disposing a semiconductor die over a first surface of the substrate;
depositing an encapsulant around the semiconductor die and over substrate;
forming a first insulating layer over the semiconductor die and encapsulant;
depositing an adhesive layer over the first insulating layer;
bonding a carrier to the adhesive layer; and
removing a portion of the substrate opposite the first surface of the substrate to expose an end and side surface of the conductive via.
2. The method of claim 1 , wherein the first insulating layer includes an organic insulating material.
3. The method of claim 1 , wherein the first insulating layer includes an inorganic insulating material.
4. The method of claim 1 , further including depositing the adhesive layer to contact only the first insulating layer.
5. The method of claim 1 , further including depositing an underfill material between the semiconductor die and substrate.
6. The method of claim 1 , further including
forming an interconnect structure over the conductive via.
7. The method of claim 1 , further including forming a second insulating layer over a second surface of the substrate opposite the first surface of the substrate with the conductive via extending from the second insulating layer.
8. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a semiconductor die over a first surface of the substrate;
depositing an encapsulant around the semiconductor die and over the substrate;
forming a first insulating layer over the semiconductor die and encapsulant;
depositing an adhesive layer over the first insulating layer; and
bonding a temporary carrier to the adhesive layer.
9. The method of claim 8 , wherein the first insulating layer includes an organic insulating material.
10. The method of claim 8 , wherein the first insulating layer includes an inorganic insulating material.
11. The method of claim 8 , further including depositing the adhesive layer to contact only the first insulating layer.
12. The method of claim 8 , further including depositing an underfill material between the semiconductor die and substrate.
13. The method of claim 8 , further including:
forming a conductive via partially through the substrate;
removing a portion of the substrate opposite the first surface of the substrate to expose an end and side surface of the conductive via;
forming an interconnect structure over the conductive via; and
removing the temporary carrier.
14. The method of claim 8 , further including forming a second insulating layer over a second surface of the substrate opposite the first surface of the substrate with a conductive via through the substrate extending from the second insulating layer.
15. A semiconductor device, comprising:
a substrate including a conductive via;
a semiconductor die disposed over a first surface of the substrate;
an encapsulant deposited around the semiconductor die and over substrate;
a first insulating layer formed over the semiconductor die and encapsulant;
an adhesive layer deposited over the first insulating layer; and
a carrier bonded to the adhesive layer,
wherein an end and side surface of the conductive via are exposed from a second surface of the substrate opposite the first surface of the substrate.
16. The semiconductor device of claim 15 , wherein the first insulating layer includes an organic insulating material.
17. The semiconductor device of claim 15 , wherein the first insulating layer includes an inorganic insulating material.
18. The semiconductor device of claim 15 , wherein the adhesive layer contacts only the first insulating layer.
19. The semiconductor device of claim 15 , further including an underfill material deposited between the semiconductor die and substrate.
20. The semiconductor device of claim 15 , further including:
a second insulating layer formed over the second surface of the substrate; and
an interconnect structure formed over the conductive via.
21. A semiconductor device, comprising:
a substrate including a conductive via;
a semiconductor die disposed over a first surface of the substrate;
an encapsulant deposited around the semiconductor die and over the substrate; and
a first insulating layer formed over the semiconductor die and encapsulant,
wherein an end and side surface of the conductive via are exposed from a second surface of the substrate opposite the first surface of the substrate.
22. The semiconductor device of claim 21 , wherein the first insulating layer includes an organic insulating material.
23. The semiconductor device of claim 21 , wherein the first insulating layer includes an inorganic insulating material.
24. The semiconductor device of claim 21 , wherein the adhesive layer contacts only the first insulating layer.
25. The semiconductor device of claim 21 , further including:
an adhesive layer deposited over the insulating layer; and
a carrier bonded to the adhesive layer.
26. The semiconductor device of claim 21 , further including:
a second insulating layer formed over the second surface of the substrate; and
an interconnect structure formed over the conductive via.
27. A method of making a semiconductor device, comprising:
providing a substrate;
forming a conductive via partially through the substrate;
disposing a semiconductor die over a first surface of the substrate;
depositing an encapsulant around the semiconductor die and over the substrate;
forming a first insulating layer over the semiconductor die and encapsulant;
bonding a carrier to the first insulating layer; and
removing a portion of the substrate opposite the first surface of the substrate to expose an end and side surface of the conductive via.
28. The method of claim 27 , wherein the first insulating layer includes an organic insulating material or an inorganic insulating material.
29. The method of claim 27 , further including depositing an underfill material between the semiconductor die and substrate.
30. The method of claim 27 , further including forming a second insulating layer over a second surface of the substrate opposite the first surface of the substrate.
31. The method of claim 27 , further including:
forming an interconnect structure over the conductive via; and
removing the carrier.