Capacitor constructions, DRAM constructions, and semiconductive material assemblies
View Patent ↗In one aspect, the invention includes an etching process, comprising: a) providing a first material over a substrate, the first material comprising from about 2% to about 20% carbon (by weight); b) providing a second material over the first material; and c) etching the second material at a faster rate than the first material. In another aspect, the invention includes a capacitor forming method, comprising: a) forming a wordline over a substrate; b) defining a node proximate the wordline; c) forming an etch stop layer over the wordline, the etch stop layer comprising carbon; d) forming an insulative layer over the etch stop layer; e) etching through the insulative layer to the etch stop layer to form an opening through the insulative layer; and e) forming a capacitor construction comprising a storage node, dielectric layer and second electrode, at least a portion of the capacitor construction being within the opening. In yet another aspect, the invention includes a semiconductive material assembly, comprising: a) a semiconductive substrate; and b) a layer over the semiconductive substrate, the layer comprising silicon, nitrogen and carbon.
1. A DRAM construction, comprising:
a pair of wordlines over a substrate, the wordlines comprising sidewall edges;
carbon-containing sidewall spacers extending along the sidewall edges of the wordlines, the carbon-containing sidewall spacers consisting essentially of silicon, oxygen and from about 2% to about 20% carbon, by weight;
three nodes proximate the wordlines, the three nodes comprising a first node, second node and third node, the second node being in gated electrical connection with the first node through one of the wordlines and being in gated electrical connection with the third node through the other of the wordlines;
an insulative layer in contact with at least one of the carbon-comprising sidewall spacers;
a first capacitor construction in electrical connection with the first node, the first capacitor construction comprising a first storage node;
a second capacitor construction in electrical connection with the third node, the second capacitor construction comprising a second storage node; and
a bit line contact in electrical connection with the second node, each of the first storage node, second storage node and bit line contact being in physical contact with one or more of the carbon-containing sidewall spacers.
2. The DRAM construction of claim 1 wherein the carbon-containing sidewall spacers comprise silicon carbide.
3. The DRAM construction of claim 1 wherein the carbon-containing sidewall spacers have a thickness of less than about 500 Å.
4. The DRAM construction of claim 1 wherein the insulative layer comprises borophophosilicate glass.