Device and method for protecting against oxidation of a conductive layer in said device
View Patent ↗In a semiconductor device including a first conductive layer, the first conductive layer is treated with a nitrogen/hydrogen plasma before an additional layer is deposited thereover. The treatment stuffs the surface with nitrogen, thereby preventing oxygen from being adsorbed onto the surface of the first conductive layer. In one embodiment, a second conductive layer is deposited onto the first conductive layer, and the plasma treatment lessens if not eliminates an oxide formed between the two layers as a result of subsequent thermal treatments. In another embodiment, a dielectric layer is deposited onto the first conductive layer, and the plasma treatment lessens if not eliminates the ability of the first conductive layer to incorporate oxygen from the dielectric.
1. A method of treating a wafer, comprising:
depositing a first conductive layer over the wafer;
depositing a second conductive layer over the wafer;
exposing the second conductive layer in situ to a reducing environment; and
exposing the second conductive layer to a material comprising HCl, wherein the first conductive layer comprises hemispherical silicon grain and wherein the second conductive layer comprises tungstein nitride.
2. The method of claim 1 wherein exposing the second conductive layer in situ to a reducing environment comprises exposing the second conductive layer to a silane gas.
3. The method of claim 1 wherein exposing the second conductive layer to a material comprising HCl comprises exposing the second conductive layer to this selection prior to exposing the second conductive layer in situ to a reducinng environment.
4. The method of claim 1 wherein exposing the second conductive layer to a material comprising HC 1 comprises exposing the second conductive layer to this selection prior to depositing the first conductive layer.
5. A method of treating a wafer, comprising:
depositing a first conductive layer over the wafer;
depositing a second conductive layer over the wafer;
exposing the second conductive layer to a reducing environment; and
passivating the second conductive layer by exposing the second conductive layer to a material comprising HCl, wherein the first conductive layer comprises hemispherical silicon grain and wherein the second conductive layer comprises tungsten nitride.
6. The method of claim 5 further comprising forming a third conductive layer on the second conductive layer.
7. The method of claim 6 further comprising forming a borophosphosilicate glass layer on the third conductive layer.
8. The method of claim 7 wherein the third conductive layer comprises polysilicon.
9. The method of claim 5 wherein exposing the second conductive layer to a reducing environment comprises exposing the second conductive layer to silane gas.
10. The method of claim 5 wherein exposing the second conductive layer to a material comprising HCl comprises exposing the second conductive layer to this selection prior to exposing the second conductive layer to a reducing environment.
11. The method of claim 5 wherein exposing the second conductive layer to a material comprising HCl comprises exposing the second conductive layer to this selection prior to depositing the first conductive layer.