IP Library Granted Patent US 6,966,934
Granted Patent B1
US 6,966,934 · App. 09/672,775 · Granted Nov 22, 2005

Gas reclaiming equipment

Assignee: Kabushiki Kaisha Toshiba
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Quick Facts
Patent No.
US 6,966,934
App. No.
09/672,775
Granted
Nov 22, 2005
Kind
B1
Abstract

A gas reclaiming equipment capable of separating SF 6 gas from a mixed gas efficiently and shortening reclaiming work under reduced pressure. A gas separation equipment is provided between a gas insulated equipment and a gas liquefaction system. The gas separation equipment separates nitrogen gas from the mixed gas, and concentrates SF6 gas. Only SF 6 gas is sent into the gas liquefaction system. The gas separation equipment uses pressure swing adsorption using an adsorbent with selective adsorption. Moreover, a buffer tank for storing mixed gas is provided between the gas separation equipment and the gas insulated equipment. The buffer tank and the gas liquefaction system are connected by a reflux-line. The reflux-line refluxes the gas in a gas phase in the gas liquefaction system to the buffer tank. Furthermore, the gas separation equipment is connected to a storage tank. The storage tank accumulates the nitrogen gas separated with the gas separation equipment. The adsorbent to adsorb SF 6 gas is enclosed in the storage tank for exhaust gas. To absorb decomposed gas, the filter has an adsorbent of the chemisorption type. The adsorbent has of a metal hydrate.

Claims (52)

1. A gas reclaiming equipment for reclaiming SF 6 gas, comprising:

a first filter for removing a decomposed gas and a foreign particulate substance from a mixed gas containing SF 6 gas which is sent from a gas insulated equipment;

a gas separation equipment configured to separate said SF 6 gas from said mixed gas to obtain a SF 6 concentrated mixed gas;

a gas liquefaction system for reclaiming said SF 6 concentrated mixed gas, wherein said gas liquefaction system liquefies said SF 6 gas of said SF 6 concentrated mixed gas by pressurizing said SF 6 concentrated mixed gas, wherein said gas separation equipment is provided between said gas insulated equipment and said gas liquefaction system;

a pump for sending said SF 6 concentrated mixed gas from said gas insulated equipment to said gas liquefaction system;

a first storage tank for accumulating an SF 6 liquid obtained by said gas liquefaction system; and

a second storage tank storing a specified gas separated by said gas separation equipment, said second storage tank including an adsorbent to adsorb said SF 6 gas.

2. The gas reclaiming equipment according to claim 1 , wherein said filter has an adsorbent of a chemisorption type which absorbs said decomposed gas.

3. A gas processing system, comprising:

the gas reclaiming equipment according to claim 1 ; and

a gas insulated equipment providing the mixed gas to the gas reclaiming equipment, wherein said gas insulated equipment has an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and having a ratio of said Zeolites wherein the 5 Å pore size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.

4. The gas reclaiming equipment of claim 1 , further comprising:

a buffer tank for storing said mixed gas, said buffer tank provided between said gas insulated equipment and said gas separation equipment.

5. The gas reclaiming equipment according to claim 4 , wherein said buffer tank has an adsorbent comprising Zeolites with 5 Å pore size and 10 Å pore size.

6. The gas reclaiming equipment according to claim 4 , wherein said buffer tank stores said mixed gas when said mixed gas is reclaimed under reduced pressure.

7. The gas reclaiming equipment according to claim 4 , wherein said gas separation equipment includes pressure swing adsorption including an adsorbent with selective adsorption.

8. The gas reclaiming equipment according to claim 4 , wherein said gas separation equipment has a second filter with a permeable membrane.

9. The gas reclaiming equipment according to claim 4 , wherein said gas separation equipment has plural separating units to separate said SF 6 gas from said mixed gas.

10. The gas reclaiming equipment according to claim 4 , wherein said filter has an adsorbent to adsorb said decomposed gas.

11. The gas reclaiming equipment according to claim 4 , wherein said gas separation equipment includes an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and wherein a ratio of said Zeolites with 5 Å pore size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.

12. A method of reclaiming insulating gas from a mixed gas of a gas insulated equipment comprising:

flowing the mixed gas though a filter to remove decomposed gas and foreign particulate substances;

separating said insulating gas from said mixed gas in a gas separating unit to obtain concentrated insulating mixed gas and sending said concentrated insulating mixed gas to a gas liquefaction system;

pressurizing the concentrated insulating mixed gas to produce a liquid;

accumulating the liquid in a first storage tank;

storing a specified gas separated in said separating step in a second storage tank, said second storage tank including an adsorbent to adsorb SF 6 gas; and

returning gas in the gas phase from the gas liquefaction system to an upstream side of the gas liquefaction system.

13. The method of claim 12 , further comprising chemisorbing decomposed gas in said filter.

14. The method of claim 12 , wherein said gas separation unit includes an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and wherein a ratio of said Zeolites with 5 Å size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.

15. A method of reclaiming insulating gas from a mixed gas of a gas insulated equipment comprising:

flowing the mixed gas though a filter to remove decomposed gas and foreign particulate substances;

flowing said mixed gas through a gas separating unit to obtain concentrated insulating mixed gas and a specified gas and sending said concentrated insulating mixed gas to a gas liquefaction system;

pressurizing an SF 6 gas of the concentrated insulating mixed gas; and

storing said specified gas in a storage tank wherein said storage tank includes an adsorbent to adsorb decomposed gas.

16. A method of reclaiming insulating gas from a mixed gas of a gas insulated equipment comprising:

flowing the mixed gas though a filter to remove decomposed gas and foreign particulate substances;

flowing said mixed gas through a gas separating unit to obtain concentrated insulating mixed gas and a specified gas and sending said concentrated insulating mixed gas to a gas liquefaction system;

pressurizing an SF 6 gas of the concentrated insulating mixed gas; and

storing said specified gas in a storage tank, wherein said storage tank includes an adsorbent to adsorb SF 6 gas.

17. The method of claim 12 , further comprising flowing the mixed gas through a buffer tank.

18. The method of claim 17 , wherein said buffer tank includes an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and wherein a ratio of said Zeolites with 5 Å pore size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.

19. The gas reclaiming equipment according to claim 1 , further comprising a line for returning a specified gas in the gas phase in said gas liquefaction system to an upstream side of said gas liquefaction system.

20. The gas reclaiming equipment according to claim 4 , further comprising a line for returning a specified gas in the gas phase in said gas liquefaction system to an upstream side of said gas liquefaction system.

21. The gas reclaiming equipment according to claim 4 , wherein said gas separation equipment includes an adsorbent having Zeolites with approximately 5 Å pore size.

22. A gas reclaiming equipment, for reclaiming SF 6 gas, comprising:

a first filter for removing a decomposed gas and a foreign particulate substance from a mixed gas containing SF 6 gas which is sent from a gas insulated equipment;

a gas separation equipment that is configured to separate said SF 6 gas from said mixed gas to obtain a SF 6 concentrated mixed gas;

a gas liquefaction system for reclaiming said SF 6 concentrated mixed gas, wherein said gas liquefaction system liquefies said SF 6 gas of said SF 6 concentrated mixed gas by pressurizing said SF 6 concentrated mixed gas, wherein said gas separation equipment is provided between said gas insulated equipment and said gas liquefaction system;

a pump for sending said SF 6 concentrated mixed gas from said gas insulated equipment to said gas liquefaction system; and

a storage tank for accumulating an SF 6 liquid obtained by said gas liquefaction system,

wherein said gas separation equipment includes an adsorbent having Zeolites with approximately 5 Å pore size and 10 Å pore size, and wherein a ratio of said Zeolites with 5 Å pore size is more than 80 wt % and said Zeolites with 10 Å pore size is less than 20 wt %.

23. The gas reclaiming equipment according to claim 1 , wherein said second storage tank has a cylindrical shape.

Assignments (2)
RELEASE Recorded Jan 14, 2003
From: SILICON VALLEY BANK
To: SILICON GAMING, INC.
Reel/Frame 013653/0956 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 7, 2001
From: SATO, TOSHIKAZU; INOHARA, TOSHIAKI; MURASE, HIROSHI; NAOTSUKA, HIROMI; IMAI, TAKAHIRO
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 011509/0177 →
Priority Claims (1)
JP 11-282045 · Oct 1, 1999 · national