IP Library › Granted Patent US 6,521,547
Granted Patent Utility
US 6,521,547 · Confirmation No. 4159

METHOD OF REPAIRING A LOW DIELECTRIC CONSTANT MATERIAL LAYER

Patented Case View Patent ↗
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 Code Description Pages PDF
2001-09-07 TRNA Transmittal of New Application 7 View
2001-09-07 ADS Application Data Sheet 2 View
2001-09-07 SPEC Specification 6 View
2001-09-07 CLM Claims 3 View
2001-09-07 ABST Abstract 2 View
2001-09-07 DRW Drawings-only black and white line drawings 11 View
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Quick Facts
Patent No.
US 6,521,547
App. No.
09/682,479
Filed
2001-09-07
Granted
2003-02-18
Examiner
NHU, DAVID
Art Unit
2818
PTA
-96 days