Patent Application
Utility
PCT National Stage
App. No. 09/700,638
· Confirmation No. 6036
BLACK DEFECT CORRECTION METHOD AND BLACK DEFECT CORRECTION DEVICE FOR PHOTOMASK
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Inventors
Osamu Takaoka
Chiba, JAPAN
Kazuo Aita
Chiba-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/5
H10P76/00
G03F1/78
G03F1/74
Y10S430/143
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Docket No.
- S004-4147 PCT
- Confirmation No.
- 6036
Foreign Priority
11-112623
·
1999-04-20
·
JAPAN
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-02-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-11-27
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Quick Facts
- App. No.
- 09/700,638
- Filed
- 2001-02-26
- Granted
- 2003-04-08
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- 0 days
External Links