IP Library › Granted Patent US 6,589,354
Granted Patent Utility
US 6,589,354 · Confirmation No. 1903

METHOD AND APPARATUS FOR IN-SITU LITHOGRAPHY MASK CLEANING

Inventor: Paul B. Reid
Patented Case View Patent ↗ View Publication ↗
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2005-03-18 COCOUT Certificate of Correction - Post Issue Communication 6 View
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2001-01-04 SPEC Specification 10 View
2001-01-04 CLM Claims 3 View
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Quick Facts
Patent No.
US 6,589,354
App. No.
09/753,665
Filed
2001-01-04
Granted
2003-07-08
Pub. No.
US20020083957A1
Art Unit
1746
PTA
-57 days