IP Library › Granted Patent US 6,453,005
Granted Patent Utility
US 6,453,005 · Confirmation No. 4443

SIO2-COATED MIRROR SUBSTRATE FOR EUV

Inventor: Winfried Kaiser
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-06-01 A.PE Preliminary Amendment 2 View
2001-06-01 SPEC Specification 6 View
2001-06-01 CLM Claims 2 View
2001-06-01 ABST Abstract 1 View
2001-01-05 TRNA Transmittal of New Application 4 View
2001-01-05 SPEC Specification 5 View
2001-01-05 CLM Claims 2 View
2001-01-05 ABST Abstract 1 View
2001-01-05 DRW Drawings-only black and white line drawings 1 View
2001-01-05 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,453,005
App. No.
09/756,018
Filed
2001-01-05
Granted
2002-09-17
Pub. No.
US20010028518A1
Art Unit
2882
PTA
-60 days