Patent Application
Utility
App. No. 09/760,402
· Confirmation No. 3123
COBALT SILICIDE ETCH PROCESS AND APPARATUS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-01-12 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-01-12 | SPEC |
Specification | 28 | View | |
| 2001-01-12 | CLM |
Claims | 9 | View | |
| 2001-01-12 | ABST |
Abstract | 1 | View | |
| 2001-01-12 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-01-12 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
156/345
H10P50/268
H01J37/32009
H01J2237/2001
Prosecution
- Examiner
- DEO, DUY VU NGUYEN
- Art Unit
- 1765
- Customer No.
- 23910
- Docket No.
- TEGL1102US2 SRM
- Confirmation No.
- 3123
Publication
- Pub. No.
- US20010003676A1
- Pub. Date
- 2001-06-14
Patent Term Adjustment
-59days
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Quick Facts
- App. No.
- 09/760,402
- Filed
- 2001-01-12
- Granted
- 2002-05-21
- Pub. No.
- US20010003676A1
- Examiner
- DEO, DUY VU NGUYEN
- Art Unit
- 1765
- PTA
- -59 days
External Links