IP Library › Granted Patent US 6,533,907
Granted Patent Utility
US 6,533,907 · Confirmation No. 1072

METHOD OF PRODUCING AMORPHOUS SILICON FOR HARD MASK AND WAVEGUIDE APPLICATIONS

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2009-12-02 PA.. Power of Attorney 4 View
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2009-07-28 PET.POA.WDRW Request for withdrawal as attorney or agent 1 View
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2001-01-19 TRNA Transmittal of New Application 1 View
2001-01-19 SPEC Specification 16 View
2001-01-19 CLM Claims 4 View
2001-01-19 ABST Abstract 1 View
2001-01-19 DRW Drawings-only black and white line drawings 6 View
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2001-01-19 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,533,907
App. No.
09/766,463
Filed
2001-01-19
Granted
2003-03-18
Pub. No.
US20020134671A1
Art Unit
1753
PTA
-102 days