IP Library › Granted Patent US 6,576,063
Granted Patent Utility
US 6,576,063 · Confirmation No. 3782

APPARATUS AND METHOD FOR USE IN MANUFACTURING A SEMICONDUCTOR DEVICE

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2019-07-17 TRIAL.TRMFWD Trial Termination or Final Written Decision 4 View
2018-02-07 SOL.NTC.SUIT Report on the filing or determination of an action regarding a patent 1 View
2003-01-14 A.PE Preliminary Amendment 1 View
2003-01-14 CLM Claims 2 View
2003-01-14 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2001-01-24 TRNA Transmittal of New Application 1 View
2001-01-24 SPEC Specification 32 View
2001-01-24 CLM Claims 5 View
2001-01-24 ABST Abstract 1 View
2001-01-24 DRW Drawings-only black and white line drawings 19 View
2001-01-24 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,576,063
App. No.
09/768,663
Filed
2001-01-24
Granted
2003-06-10
Pub. No.
US20010029112A1
Art Unit
2812
PTA
-218 days