Granted Patent
Utility
US 6,284,419
· Confirmation No. 4742
Methods of reducing proximity effects in lithographic processes
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-12-30 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2010-12-30 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2010-12-20 | PA.. |
Power of Attorney | 1 | View | |
| 2010-12-20 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2010-12-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2001-01-24 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-01-24 | A.PE |
Preliminary Amendment | 13 | View | |
| 2001-01-24 | SPEC |
Specification | 11 | View | |
| 2001-01-24 | CLM |
Claims | 11 | View | |
| 2001-01-24 | ABST |
Abstract | 1 | View | |
| 2001-01-24 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-01-24 | OATH |
Oath or Declaration filed | 10 | View |
Inventors
Christophe Pierrat
Boise, ID
James E. Burdorf
Tualitin, OR
William Baggenstoss
Boise, ID
William Stanton
Boise, ID
Attorneys & Agents of Record
Classification
USPC
430/30
G03F1/36
G03F7/70441
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Customer No.
- 58907
- Docket No.
- ROUND 3.0-065 CON
- Confirmation No.
- 4742
Publication
- Pub. No.
- US20010002304A1
- Pub. Date
- 2001-05-31
Patent Term Adjustment
-71days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,284,419
- App. No.
- 09/769,603
- Filed
- 2001-01-24
- Granted
- 2001-09-04
- Pub. No.
- US20010002304A1
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- -71 days
External Links