Granted Patent
Utility
US 6,433,878
· Confirmation No. 8686
METHOD AND APPARATUS FOR THE DETERMINATION OF MASK RULES USING SCATTEROMETRY
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-01-29 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-01-29 | SPEC |
Specification | 20 | View | |
| 2001-01-29 | CLM |
Claims | 3 | View | |
| 2001-01-29 | ABST |
Abstract | 1 | View | |
| 2001-01-29 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2001-01-29 | OATH |
Oath or Declaration filed | 7 | View | |
| 2001-01-29 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-01-29 | SPEC |
Specification | 20 | View | |
| 2001-01-29 | CLM |
Claims | 3 | View | |
| 2001-01-29 | ABST |
Abstract | 1 | View | |
| 2001-01-29 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2001-01-29 | OATH |
Oath or Declaration filed | 7 | View |
Inventors
Xinhui Niu
San Jose, CA
Nickhil H. Jakatdar
Fremont, CA
Attorneys & Agents of Record
Classification
USPC
356/603
G03F7/70608
G03F1/36
G03F1/68
G03F7/70441
Prosecution
- Examiner
- NGUYEN, SANG H
- Art Unit
- 2877
- Customer No.
- 69792
- Docket No.
- 50998-20010.00(TTI-023)
- Confirmation No.
- 8686
Publication
- Pub. No.
- US20020131055A1
- Pub. Date
- 2002-09-19
Patent Term Adjustment
0days
No related applications found.
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Quick Facts
- Patent No.
- US 6,433,878
- App. No.
- 09/772,148
- Filed
- 2001-01-29
- Granted
- 2002-08-13
- Pub. No.
- US20020131055A1
- Examiner
- NGUYEN, SANG H
- Art Unit
- 2877
- PTA
- 0 days
External Links