Granted Patent
Utility
US 6,435,428
· Confirmation No. 7437
SHOWERHEAD APPARATUS FOR RADICAL-ASSISTED DEPOSITION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-01-03 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2001-02-02 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-02-02 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-02-02 | SPEC |
Specification | 8 | View | |
| 2001-02-02 | CLM |
Claims | 3 | View | |
| 2001-02-02 | ABST |
Abstract | 1 | View | |
| 2001-02-02 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-02-02 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Jae Ho Kim
Cheongju, KOREA, REPUBLIC OF
In Chel Shin
Seoul, KOREA, REPUBLIC OF
Sang Joon Park
Daejeon, KOREA, REPUBLIC OF
Kwan Goo Rha
Cheongju, KOREA, REPUBLIC OF
Sang Ho Kim
Daejeon, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Classification
USPC
239/553
H10P50/242
C23C16/45565
H10P72/0421
C23C16/452
C23C16/45574
H01J37/32082
Prosecution
- Examiner
- DOUGLAS, LISA ANN
- Art Unit
- 3752
- Customer No.
- 570
- Docket No.
- 10061-024US (PO2000-34US)
- Confirmation No.
- 7437
Foreign Priority
2000-7366
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2000-02-16
·
REPUBLIC OF KOREA
Publication
- Pub. No.
- US20010042799A1
- Pub. Date
- 2001-11-22
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-02-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-07-13
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-02-02
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Quick Facts
- Patent No.
- US 6,435,428
- App. No.
- 09/776,004
- Filed
- 2001-02-02
- Granted
- 2002-08-20
- Pub. No.
- US20010042799A1
- Examiner
- DOUGLAS, LISA ANN
- Art Unit
- 3752
- PTA
- 0 days
External Links