IP Library › Granted Patent US 6,569,692
Granted Patent Utility
US 6,569,692 · Confirmation No. 9413

AUTOMATED METHOD OF CONTROLLING PHOTORESIST DEVELOP TIME TO CONTROL CRITICAL DIMENSIONS, AND SYSTEM FOR ACCOMPLISHING SAME

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2021-05-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2021-05-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2021-05-26 PA.. Power of Attorney 12 View
2021-05-26 R3.73 Assignee showing of ownership per 37 CFR 3.73 12 View
2021-05-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2020-02-27 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-02-27 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-02-25 PA.. Power of Attorney 1 View
2020-02-25 R3.73 Assignee showing of ownership per 37 CFR 3.73 7 View
2020-02-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-02-02 TRNA Transmittal of New Application 3 View
2001-02-02 SPEC Specification 19 View
2001-02-02 CLM Claims 7 View
2001-02-02 ABST Abstract 1 View
2001-02-02 DRW Drawings-only black and white line drawings 5 View
2001-02-02 OATH Oath or Declaration filed 3 View
2001-02-02 TRNA Transmittal of New Application 3 View
2001-02-02 SPEC Specification 19 View
2001-02-02 CLM Claims 7 View
2001-02-02 ABST Abstract 1 View
2001-02-02 DRW Drawings-only black and white line drawings 5 View
2001-02-02 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,569,692
App. No.
09/776,087
Filed
2001-02-02
Granted
2003-05-27
Art Unit
2822
PTA
-11 days