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US 6,770,146 · Confirmation No. 8139

METHOD AND SYSTEM FOR ROTATING A SEMICONDUCTOR WAFER IN PROCESSING CHAMBERS

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2004-03-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
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2004-03-08 N/AP Notice of Appeal Filed 1 View
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2004-01-07 REM Applicant Arguments/Remarks Made in an Amendment 1 View
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2002-11-15 CTNF Non-Final Rejection 7 View
2002-11-15 1449 List of References cited by applicant and considered by examiner 2 View
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2001-02-02 SPEC Specification 21 View
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2001-02-02 DRW Drawings-only black and white line drawings 7 View
2001-02-02 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
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2001-02-02 FWCLM Index of Claims 1 View
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2001-02-02 DRW Drawings-only black and white line drawings 7 View
2001-02-02 SPEC Specification 21 View
2001-02-02 CLM Claims 8 View
2001-02-02 ABST Abstract 1 View
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Quick Facts
Patent No.
US 6,770,146
App. No.
09/776,241
Filed
2001-02-02
Granted
2004-08-03
Pub. No.
US20020104619A1
Art Unit
1763
PTA
-263 days