Patent Application
Utility
App. No. 09/776,279
· Confirmation No. 1291
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers
Expressly Abandoned -- During Publication Process
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-02 | ABST |
Abstract | 1 | View | |
| 2001-02-02 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-02-02 | A.PE |
Preliminary Amendment | 4 | View | |
| 2001-02-02 | SPEC |
Specification | 16 | View | |
| 2001-02-02 | CLM |
Claims | 2 | View | |
| 2001-02-02 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-02-02 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Lee Melbourne Cook
Steelville, PA
David B. James
Newark, DE
William D. Budinger
Wilmington, DE
John V.H. Roberts
Newark, DE
Michael R. Oliver
Portland, OR
Nina G. Chechik
Hockessin, DE
Richard M. Levering JR.
Hockessin, DE
Attorneys & Agents of Record
Classification
USPC
156/345
B24B37/26
H10P90/129
B24B37/04
B24B41/047
B24B57/02
B24D3/28
B24D3/34
B24D13/10
G11B23/0021
Prosecution
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- Docket No.
- 2755-097U4
- Confirmation No.
- 1291
Publication
- Pub. No.
- US20020020495A1
- Pub. Date
- 2002-02-21
Parent
is a Continuation of
→
App. 09/634,788
· US 6,210,525
Filed 2000-08-09
· Patented Case
Parent
is a Continuation of
→
App. 09/498,267
· US 6,245,679
Filed 2000-02-03
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/363,540
· US 6,030,899
Filed 1999-07-29
· Patented Case
Parent
is a Continuation of
→
App. 08/912,144
· US 5,932,486
Filed 1997-08-15
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/024,114
Filed 1996-08-16
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 09/384,607
· US 6,375,559
Filed 1999-08-27
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Continuation of
→
App. 09/049,864
· US 6,099,394
Filed 1998-03-27
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/042,115
Filed 1997-03-28
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/041,844
Filed 1997-04-09
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/064,875
Filed 1997-11-06
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 09/021,437
· US 6,022,264
Filed 1998-02-10
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/037,582
Filed 1997-02-10
· Provisional Application Expired
Child
is a Continuation in-part of
→
App. 09/833,309
· US 6,537,137
Filed 2001-04-12
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 10/061,783
· US 6,518,188
Filed 2002-02-01
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 09/776,279
- Filed
- 2001-02-02
- Pub. No.
- US20020020495A1
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
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