Patent Application
Utility
App. No. 10/061,783
· Confirmation No. 3815
APPARATUS AND METHODS FOR CHEMICAL-MECHANICAL POLISHING OF SEMICONDUCTOR WAFERS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Inventors
Attorneys & Agents of Record
Classification
USPC
438/692
B24B37/26
H10P90/129
B24B37/04
B24B41/047
B24B57/02
B24D3/28
B24D3/34
B24D13/10
G11B23/0021
Prosecution
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- Customer No.
- 61611
- Docket No.
- 2755-097U4A
- Confirmation No.
- 3815
Publication
- Pub. No.
- US20020098702A1
- Pub. Date
- 2002-07-25
Patent Term Adjustment
-33days
Parent
is a Continuation of
→
App. 09/776,279
Filed 2001-02-02
· Expressly Abandoned -- During Publication Process
Parent
is a Continuation of
→
App. 09/634,788
· US 6,210,525
Filed 2000-08-09
· Patented Case
Parent
is a Continuation of
→
App. 09/498,267
· US 6,245,679
Filed 2000-02-03
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/363,540
· US 6,030,899
Filed 1999-07-29
· Patented Case
Parent
is a Continuation of
→
App. 08/912,144
· US 5,932,486
Filed 1997-08-15
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/024,114
Filed 1996-08-16
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 09/384,607
· US 6,375,559
Filed 1999-08-27
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Continuation of
→
App. 09/049,864
· US 6,099,394
Filed 1998-03-27
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/042,115
Filed 1997-03-28
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/041,844
Filed 1997-04-09
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/064,875
Filed 1997-11-06
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 09/021,437
· US 6,022,264
Filed 1998-02-10
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/037,582
Filed 1997-02-10
· Provisional Application Expired
from
RODEL HOLDINGS, INC.
CHANGE OF NAME
Recorded 2004-06-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-27
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Quick Facts
- App. No.
- 10/061,783
- Filed
- 2002-02-01
- Granted
- 2003-02-11
- Pub. No.
- US20020098702A1
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- PTA
- -33 days
External Links