Granted Patent
Utility
US 6,319,644
· Confirmation No. 9338
Methods of reducing proximity effects in lithographic processes
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-12-30 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2010-12-30 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2010-12-20 | PA.. |
Power of Attorney | 1 | View | |
| 2010-12-20 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2010-12-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2001-02-12 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-02-12 | A.PE |
Preliminary Amendment | 13 | View | |
| 2001-02-12 | SPEC |
Specification | 11 | View | |
| 2001-02-12 | CLM |
Claims | 11 | View | |
| 2001-02-12 | ABST |
Abstract | 1 | View | |
| 2001-02-12 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-02-12 | OATH |
Oath or Declaration filed | 10 | View | |
| 2001-02-12 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-02-12 | A.PE |
Preliminary Amendment | 13 | View | |
| 2001-02-12 | SPEC |
Specification | 11 | View | |
| 2001-02-12 | CLM |
Claims | 11 | View | |
| 2001-02-12 | ABST |
Abstract | 1 | View | |
| 2001-02-12 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-02-12 | OATH |
Oath or Declaration filed | 10 | View |
Inventors
Christophe Pierrat
Boise, ID
James E. Burdorf
Tualitin, OR
William Baggenstoss
Boise, ID
William Stanton
Boise, ID
Attorneys & Agents of Record
Classification
USPC
430/30
G03F1/36
G03F7/70441
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Customer No.
- 58907
- Docket No.
- ROUND 3.0-065 CON CON CON
- Confirmation No.
- 9338
Publication
- Pub. No.
- US20010023045A1
- Pub. Date
- 2001-09-20
Patent Term Adjustment
-106days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,319,644
- App. No.
- 09/780,407
- Filed
- 2001-02-12
- Granted
- 2001-11-20
- Pub. No.
- US20010023045A1
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- -106 days
External Links