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App. No. 09/781,037 · Confirmation No. 1596

ATMOSPHERIC PRESSURE PLASMA ENHANCED ABATEMENT OF SEMICONDUCTOR PROCESS EFFLUENT SPECIES

Inventor: Jose I. Arno
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-02-09 TRNA Transmittal of New Application 1 View
2001-02-09 SPEC Specification 13 View
2001-02-09 CLM Claims 5 View
2001-02-09 ABST Abstract 1 View
2001-02-09 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
App. No.
09/781,037
Filed
2001-02-09
Granted
2003-06-10
Pub. No.
US20020111045A1
Art Unit
2822
PTA
-83 days