IP Library › Patent Application 09789304
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App. No. 09/789,304 · Confirmation No. 7378

PHOTOLITHOGRAPHIC APPARATUS

Inventor: Christophe Pierrat
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-02-20 TRNA Transmittal of New Application 2 View
2001-02-20 A.PE Preliminary Amendment 15 View
2001-02-20 SPEC Specification 18 View
2001-02-20 CLM Claims 12 View
2001-02-20 ABST Abstract 1 View
2001-02-20 DRW Drawings-only black and white line drawings 8 View
2001-02-20 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
09/789,304
Filed
2001-02-20
Granted
2003-04-29
Pub. No.
US20010015796A1
Art Unit
2851
PTA
-13 days