Granted Patent
Utility
US 6,472,756
· Confirmation No. 8509
METHOD OF FORMING TITANIUM SILICIDE AND TITANIUM BY CHEMICAL VAPOR DEPOSITION AND RESULTING APPARATUS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-02-21 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-02-21 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-02-21 | SPEC |
Specification | 11 | View | |
| 2001-02-21 | CLM |
Claims | 9 | View | |
| 2001-02-21 | ABST |
Abstract | 1 | View | |
| 2001-02-21 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-02-21 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
257/770
H10W20/033
H10P14/42
H10W20/047
H10P14/43
H10D64/01125
H10D64/0112
C23C16/02
C23C16/0236
C23C16/42
Prosecution
- Examiner
- COLLINS, DEVEN M
- Art Unit
- 2823
- Customer No.
- 21186
- Docket No.
- 303.213US6
- Confirmation No.
- 8509
Publication
- Pub. No.
- US20010006240A1
- Pub. Date
- 2001-07-05
Patent Term Adjustment
-6days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,472,756
- App. No.
- 09/789,999
- Filed
- 2001-02-21
- Granted
- 2002-10-29
- Pub. No.
- US20010006240A1
- Examiner
- COLLINS, DEVEN M
- Art Unit
- 2823
- PTA
- -6 days
External Links