IP Library › Granted Patent US 6,479,409
Granted Patent Utility
US 6,479,409 · Confirmation No. 6722

FABRICATION OF A SEMICONDUCTOR DEVICE WITH AN INTERLAYER INSULATING FILM FORMED FROM A PLASMA DEVOID OF AN OXIDIZING AGENT

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 Code Description Pages PDF
2001-02-23 TRNA Transmittal of New Application 3 View
2001-02-23 A.PE Preliminary Amendment 2 View
2001-02-23 SPEC Specification 41 View
2001-02-23 CLM Claims 6 View
2001-02-23 ABST Abstract 1 View
2001-02-23 DRW Drawings-only black and white line drawings 13 View
2001-02-23 OATH Oath or Declaration filed 5 View
2001-02-23 TRNA Transmittal of New Application 3 View
2001-02-23 A.PE Preliminary Amendment 2 View
2001-02-23 SPEC Specification 41 View
2001-02-23 CLM Claims 6 View
2001-02-23 ABST Abstract 1 View
2001-02-23 DRW Drawings-only black and white line drawings 13 View
2001-02-23 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,479,409
App. No.
09/790,568
Filed
2001-02-23
Granted
2002-11-12
Pub. No.
US20010031563A1
Art Unit
2824
PTA
-132 days