IP Library Patent Application 09793417
Patent Application Utility
App. No. 09/793,417 · Confirmation No. 2192

CORRECTION OF LAYOUT PATTERN DATA DURING SEMICONDUCTOR PATTERNING PROCESS

Inventor: Yusaku Ono
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2003-12-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-12-15 LET. Miscellaneous Incoming Letter 1 View
2003-12-15 DRW Drawings-only black and white line drawings 20 View
2001-02-27 TRNA Transmittal of New Application 2 View
2001-02-27 SPEC Specification 20 View
2001-02-27 CLM Claims 4 View
2001-02-27 ABST Abstract 1 View
2001-02-27 DRW Drawings-only black and white line drawings 19 View
2001-02-27 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/793,417
Filed
2001-02-27
Granted
2004-02-03
Pub. No.
US20020026624A1
Art Unit
2851
PTA
-51 days