Granted Patent
Utility
US 6,538,720
· Confirmation No. 2852
LITHOGRAPHIC TOOL WITH DUAL ISOLATION SYSTEM AND METHOD FOR CONFIGURING THE SAME
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2006-06-08 | PA.. |
Power of Attorney | 1 | View | |
| 2006-06-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2001-02-28 | TRNA |
Transmittal of New Application | 6 | View | |
| 2001-02-28 | ADS |
Application Data Sheet | 1 | View | |
| 2001-02-28 | SPEC |
Specification | 48 | View | |
| 2001-02-28 | CLM |
Claims | 12 | View | |
| 2001-02-28 | ABST |
Abstract | 1 | View | |
| 2001-02-28 | DRW |
Drawings-only black and white line drawings | 21 | View | |
| 2001-02-28 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Daniel N. Galburt
Wilton, CT
Peter C. Kochersperger
Easton, CT
Attorneys & Agents of Record
Classification
USPC
355/53
H10P76/00
G03F7/70833
G03F7/709
Prosecution
- Examiner
- BROWN, KHALED
- Art Unit
- 2851
- Customer No.
- 26111
- Docket No.
- 1857.0370000
- Confirmation No.
- 2852
Publication
- Pub. No.
- US20020118346A1
- Pub. Date
- 2002-08-29
Patent Term Adjustment
-68days
Child
is a Continuation of
→
App. 11/248,141
· US 7,158,213
Filed 2005-10-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 10/369,569
· US 7,164,463
Filed 2003-02-21
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
SILICON VALLEY GROUP, INC.,
ASML US, INC.,
ASM LITHOGRAPHY, INC. AND ASML US, LLC,
ASML US, INC.
CHANGE OF NAME, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT
Recorded 2004-03-31
from
SILICON VALLEY GROUP, INC.,
ASML US, INC.,
ASM LITHOGRAPHY, INC. AND ASML US, LLC,
ASML US, INCORPORATED
CHANGE OF NAME, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT
Recorded 2004-03-24
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-02-28
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Quick Facts
- Patent No.
- US 6,538,720
- App. No.
- 09/794,133
- Filed
- 2001-02-28
- Granted
- 2003-03-25
- Pub. No.
- US20020118346A1
- Examiner
- BROWN, KHALED
- Art Unit
- 2851
- PTA
- -68 days
External Links