IP Library › Granted Patent US 6,699,624
Granted Patent Utility
US 6,699,624 · Confirmation No. 3148

GRATING TEST PATTERNS AND METHODS FOR OVERLAY METROLOGY

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 Code Description Pages PDF
2003-11-18 IFEE Issue Fee Payment (PTO-85B) 3 View
2003-11-18 LET. Miscellaneous Incoming Letter 1 View
2003-09-18 A.NA Amendment after Notice of Allowance (Rule 312) 1 View
2003-09-18 SPEC Specification 1 View
2003-09-18 CLM Claims 4 View
2003-09-18 LET. Miscellaneous Incoming Letter 2 View
2003-07-22 FOR Foreign Reference 16 View
2003-07-22 FOR Foreign Reference 22 View
2003-07-22 LET. Miscellaneous Incoming Letter 1 View
2003-07-22 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2001-02-27 TRNA Transmittal of New Application 4 View
2001-02-27 SPEC Specification 12 View
2001-02-27 CLM Claims 5 View
2001-02-27 ABST Abstract 1 View
2001-02-27 DRW Drawings-only black and white line drawings 13 View
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Quick Facts
Patent No.
US 6,699,624
App. No.
09/794,686
Filed
2001-02-27
Granted
2004-03-02
Pub. No.
US20020135875A1
Art Unit
1756
PTA
-390 days