IP Library Granted Patent US 6,361,417
Granted Patent Utility
US 6,361,417 · Confirmation No. 4856

Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates

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Code Description Pages PDF
2001-02-27 TRNA Transmittal of New Application 4 View
2001-02-27 ADS Application Data Sheet 2 View
2001-02-27 A.PE Preliminary Amendment 2 View
2001-02-27 SPEC Specification 17 View
2001-02-27 CLM Claims 18 View
2001-02-27 ABST Abstract 1 View
2001-02-27 DRW Drawings-only black and white line drawings 8 View
2001-02-27 OATH Oath or Declaration filed 7 View
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Quick Facts
Patent No.
US 6,361,417
App. No.
09/795,248
Filed
2001-02-27
Granted
2002-03-26
Pub. No.
US20010006877A1
Art Unit
3723
PTA
-67 days