Granted Patent
Utility
US 6,558,234
· Confirmation No. 4761
METHOD AND APPARATUS FOR SUPPORTING A POLISHING PAD DURING CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC SUBSTRATES
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-02-27 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-02-27 | ADS |
Application Data Sheet | 2 | View | |
| 2001-02-27 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-02-27 | SPEC |
Specification | 17 | View | |
| 2001-02-27 | CLM |
Claims | 18 | View | |
| 2001-02-27 | ABST |
Abstract | 1 | View | |
| 2001-02-27 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-02-27 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Michael A. Walker
Kuna, ID
Karl M. Robinson
Boise, ID
Attorneys & Agents of Record
Classification
USPC
451/41
Prosecution
- Examiner
- MCDONALD, SHANTESE L
- Art Unit
- 3723
- Customer No.
- 27076
- Docket No.
- 500030.03
- Confirmation No.
- 4761
Publication
- Pub. No.
- US20010006878A1
- Pub. Date
- 2001-07-05
Patent Term Adjustment
-6days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,558,234
- App. No.
- 09/795,263
- Filed
- 2001-02-27
- Granted
- 2003-05-06
- Pub. No.
- US20010006878A1
- Examiner
- MCDONALD, SHANTESE L
- Art Unit
- 3723
- PTA
- -6 days
External Links