Granted Patent
Utility
US 6,364,757
· Confirmation No. 6561
Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates
Inventor:
Scott E. Moore
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-02-27 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-02-27 | ADS |
Application Data Sheet | 2 | View | |
| 2001-02-27 | A.PE |
Preliminary Amendment | 5 | View | |
| 2001-02-27 | SPEC |
Specification | 14 | View | |
| 2001-02-27 | CLM |
Claims | 16 | View | |
| 2001-02-27 | ABST |
Abstract | 1 | View | |
| 2001-02-27 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-02-27 | OATH |
Oath or Declaration filed | 10 | View | |
| 2001-02-27 | CLM |
Claims | 1 | View |
Inventors
Scott E. Moore
Meridian, ID
Attorneys & Agents of Record
Classification
USPC
451/530
H10P52/00
B24B37/26
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Customer No.
- 27076
- Docket No.
- 500390.09
- Confirmation No.
- 6561
Publication
- Pub. No.
- US20010009841A1
- Pub. Date
- 2001-07-26
Patent Term Adjustment
-120days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,364,757
- App. No.
- 09/795,282
- Filed
- 2001-02-27
- Granted
- 2002-04-02
- Pub. No.
- US20010009841A1
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- -120 days
External Links