IP Library Granted Patent US 6,331,139
Granted Patent Utility
US 6,331,139 · Confirmation No. 6562

Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates

⬇ PDF
Code Description Pages PDF
2001-02-27 TRNA Transmittal of New Application 3 View
2001-02-27 ADS Application Data Sheet 2 View
2001-02-27 A.PE Preliminary Amendment 2 View
2001-02-27 SPEC Specification 17 View
2001-02-27 CLM Claims 18 View
2001-02-27 ABST Abstract 1 View
2001-02-27 DRW Drawings-only black and white line drawings 8 View
2001-02-27 OATH Oath or Declaration filed 7 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,331,139
App. No.
09/795,283
Filed
2001-02-27
Granted
2001-12-18
Pub. No.
US20010006879A1
Art Unit
3723
PTA
0 days