IP Library Patent Application 09795336
Patent Application Utility
App. No. 09/795,336 · Confirmation No. 6504

METHOD AND APPARATUS FOR MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC SUBSTRATES

Inventor: Scott E. Moore
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2001-02-27 TRNA Transmittal of New Application 3 View
2001-02-27 ADS Application Data Sheet 2 View
2001-02-27 A.PE Preliminary Amendment 2 View
2001-02-27 SPEC Specification 14 View
2001-02-27 CLM Claims 17 View
2001-02-27 ABST Abstract 1 View
2001-02-27 DRW Drawings-only black and white line drawings 6 View
2001-02-27 OATH Oath or Declaration filed 10 View
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Quick Facts
App. No.
09/795,336
Filed
2001-02-27
Granted
2003-03-25
Pub. No.
US20010006875A1
Art Unit
3731
PTA
-6 days