IP Library Granted Patent US 6,548,223
Granted Patent Utility
US 6,548,223 · Confirmation No. 7635

METHODS OF FORMING PATTERNS ACROSS PHOTORESIST AND METHODS OF FORMING RADIATION-PATTERNING TOOLS

Inventor: J. Brett Rolfson
⬇ PDF
Code Description Pages PDF
2001-02-28 TRNA Transmittal of New Application 2 View
2001-02-28 SPEC Specification 18 View
2001-02-28 CLM Claims 11 View
2001-02-28 ABST Abstract 1 View
2001-02-28 DRW Drawings-only black and white line drawings 6 View
2001-02-28 OATH Oath or Declaration filed 9 View
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Quick Facts
Patent No.
US 6,548,223
App. No.
09/797,352
Filed
2001-02-28
Granted
2003-04-15
Pub. No.
US20020119397A1
Examiner
SAGAR, KRIPA
Art Unit
1756
PTA
0 days