IP Library › Patent Application 09800172
Patent Application Utility Small
App. No. 09/800,172 · Confirmation No. 1219

Device for dry etching a wafer and appertaining method

Inventor: Franz Sumnitsch
Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-03-06 TRNA Transmittal of New Application 5 View
2001-03-06 A.PE Preliminary Amendment 4 View
2001-03-06 SPEC Specification 11 View
2001-03-06 CLM Claims 3 View
2001-03-06 ABST Abstract 1 View
2001-03-06 DRW Drawings-only black and white line drawings 1 View
2001-03-06 OATH Oath or Declaration filed 5 View
2001-03-06 TRNA Transmittal of New Application 5 View
2001-03-06 A.PE Preliminary Amendment 4 View
2001-03-06 SPEC Specification 11 View
2001-03-06 CLM Claims 3 View
2001-03-06 ABST Abstract 1 View
2001-03-06 DRW Drawings-only black and white line drawings 1 View
2001-03-06 OATH Oath or Declaration filed 5 View
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Quick Facts
App. No.
09/800,172
Filed
2001-03-06
Pub. No.
US20010008804A1
Art Unit
1765