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App. No. 09/803,320 · Confirmation No. 8693

MULTI-INPUT, MULTI-OUTPUT MOTION CONTROL FOR LITHOGRAPHY SYSTEM

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2006-09-19 COCOUT Certificate of Correction - Post Issue Communication 2 View
2006-05-09 COCX Supervisory Patent Examiner Response - Return for Certificate of Correction 1 View
2006-03-17 IMIS Miscellaneous Internal Document 1 View
2006-01-17 COCIN Request for Certificate of Correction 5 View
2004-08-05 LET. Miscellaneous Incoming Letter 3 View
2004-08-05 NFDR Notice of Formal Drawings Required 1 View
2004-08-05 DRW Drawings-only black and white line drawings 25 View
2004-06-10 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-06-10 NFDR Notice of Formal Drawings Required 2 View
2004-03-29 IFEE Issue Fee Payment (PTO-85B) 4 View
2004-02-27 LET. Miscellaneous Incoming Letter 1 View
2004-02-27 DRW Drawings-only black and white line drawings 21 View
2004-01-07 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-07 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-07 FWCLM Index of Claims 1 View
2004-01-07 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-22 SRNT Examiner's search strategy and results 1 View
2003-12-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-12-02 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-12-02 DIST Terminal Disclaimer Filed 1 View
2003-12-02 C.AD Change of Address 1 View
2003-10-15 PA.. Power of Attorney 10 View
2003-09-04 CTNF Non-Final Rejection 9 View
2003-09-04 892 List of references cited by examiner 1 View
2003-09-04 1449 List of References cited by applicant and considered by examiner 1 View
2003-09-04 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2003-08-22 SRNT Examiner's search strategy and results 1 View
2003-08-06 DIST Terminal Disclaimer Filed 4 View
2003-08-05 SRNT Examiner's search strategy and results 1 View
2003-04-30 LET. Miscellaneous Incoming Letter 5 View
2003-04-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-04-30 SPEC Specification 1 View
2003-04-30 CLM Claims 1 View
2003-04-30 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-04-30 ABST Abstract 1 View
2003-04-30 CLM Claims 2 View
2003-04-30 SPEC Specification 1 View
2003-02-27 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-02-27 FOR Foreign Reference 24 View
2003-01-03 LET. Miscellaneous Incoming Letter 3 View
2003-01-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-01-03 SPEC Specification 1 View
2003-01-03 CLM Claims 1 View
2003-01-03 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-01-03 CLM Claims 1 View
2002-10-03 CTNF Non-Final Rejection 9 View
2002-10-03 892 List of references cited by examiner 1 View
2002-10-03 1449 List of References cited by applicant and considered by examiner 4 View
2002-09-26 SRNT Examiner's search strategy and results 1 View
2002-04-17 STATUS.LET Request for status of Application 2 View
2002-04-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-04-17 DRW Drawings-only black and white line drawings 1 View
2002-04-17 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2002-04-17 DRW Drawings-only black and white line drawings 2 View
2002-04-17 PA.. Power of Attorney 3 View
2002-04-17 LET. Miscellaneous Incoming Letter 2 View
2002-02-12 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2002-01-09 LET. Miscellaneous Incoming Letter 4 View
2002-01-09 XT/ Extension of Time 1 View
2002-01-09 OATH Oath or Declaration filed 3 View
2001-05-22 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-03-09 TRNA Transmittal of New Application 2 View
2001-03-09 ADS Application Data Sheet 3 View
2001-03-09 SPEC Specification 33 View
2001-03-09 CLM Claims 2 View
2001-03-09 ABST Abstract 1 View
2001-03-09 DRW Drawings-only black and white line drawings 25 View
2001-03-09 TRNA Transmittal of New Application 2 View
2001-03-09 ADS Application Data Sheet 3 View
2001-03-09 SPEC Specification 33 View
2001-03-09 CLM Claims 2 View
2001-03-09 ABST Abstract 1 View
2001-03-09 DRW Drawings-only black and white line drawings 25 View
2001-03-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-03-09 SRFW Search information including classification, databases and other search related notes 1 View
2001-03-09 FWCLM Index of Claims 1 View
2001-03-09 TRNA Transmittal of New Application 2 View
2001-03-09 DRW Drawings-only black and white line drawings 25 View
2001-03-09 SPEC Specification 33 View
2001-03-09 CLM Claims 2 View
2001-03-09 ABST Abstract 1 View
2001-03-09 WFEE Fee Worksheet (SB06) 1 View
2001-03-09 WFEE Fee Worksheet (SB06) 1 View
2001-03-09 WCLM Claims Worksheet (PTO-2022) 1 View
2001-03-09 ADS Application Data Sheet 3 View
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Quick Facts
App. No.
09/803,320
Filed
2001-03-09
Granted
2004-09-14
Pub. No.
US20020101253A1
Art Unit
2873
PTA
-564 days