Patent Assignment
Reel/Frame 014044/0971
Assignment of Assignor's Interest
Recorded: 2003-10-10
Pages: 6
Assignors
PLETNER, BARUCH
Executed: 2003-09-13
PERKINS, RICHARD
Executed: 2003-09-10
LUBLIN, LEONARD
Executed: 2003-09-26
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT. MS/4-2C, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Multi-Input, Multi-Output Motion Control for Lithography System