IP Library Granted Patent US 6,593,058
Granted Patent Utility PCT National Stage
US 6,593,058 · Confirmation No. 4889

PHOTORESISTS, POLYMERS AND PROCESSES FOR MICROLITHOGRAPHY

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2001-03-23 LET. Miscellaneous Incoming Letter 55 View
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Quick Facts
Patent No.
US 6,593,058
App. No.
09/806,096
Filed
2001-03-23
Granted
2003-07-15
Examiner
LEE, SIN J
Art Unit
1752
PTA
0 days